■Explain organic-TFT manufacturing process by illustration
■Full-cover from basic process to next generation process
■Cover structure, substrate, material, and manufacturing process
■Indicate molecule structure of organic material and SAM material

■Easy to look at the file using any PC because of the format of browser, for example IE (Internet Explorer)
■Possible to access at will from Index Page to detail page

■Describe these illustrations at 3D image
■Number of total file are 82 (about 220 page in A4 form equivalent)
■Illustrations of device structure and process flow are approximately 450.

Categorization and manufacturing process of organic-TFT (General theory)
■Bottom gate/bottom contact structure
■Bottom gate/top contact structure
■Top gate/bottom contact structure
■Top gate/top contact structure
■Vertical type SIT (Static Induction Transistor)

Manufacturing process of organic-TFT (Particular theory)　
■Forming process of gate electrode (Inorganic electrode)
■Forming process of gate electrode (Metal ink)
■Forming process of gate electrode (Conductive polymer)
■Forming process of gate insulator film

■Forming process of organic semiconductor layer
　 Evaporation process of small molecular organic semiconductor layer
　 Wet-coating process of wettable organic semiconductor
　 Alignment process of small molecular organic semiconductor
　 Surface modification process
　 Forming process of SAM film
　
■Forming process of inorganic S/D electrode (Vacuum deposition)
■Forming process of S/D electrode (Conductive polymer)
■Forming process of S/D electrode (Metal ink or paste)
■Forming process of S/D electrode (CNT)
　 Surface modification process

■Forming process of passivation layer
■Forming process of transparent pixel electrode
■Forming process of reflective pixel electrode
■Forming process of transparent pixel electrode (Conductive polymer, CNT, and Nano size Ag)
　　
A word of caution in manufacturing of organic-TFT with flexible substrate
■Case of using flexible substrate with film shape
■Organic-TFT and device are manufactured on original substrate, and then transferred to plastic film
■Resin is coated on support substrate and cured, and then, organic-TFT and device are manufactured on resin film, finally, support substrate is released (the resin film is used as substrate)

▲Process flow of single-like organic semiconductor

▲Process flow of bottom contact type organic-TFT

▲Organic semiconductor materials

▲Co-forming process of S/D and organic semiconductor layer

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