■Explain CNT-TFT manufacturing process by illustration
■Full-cover from basic process to next generation process
■Cover structure, substrate, material, and manufacturing process
■Clearly difference of printable TFT and high quality TFT, which are main kinds of CNT-TFT
■In the CNT semiconductor layer process, the detail processes from pre-treatment to CVD/wet coating process are explained

■Easy to look at the file using any PC because of the format of browser, for example IE (Internet Explorer)
■Possible to access at will from Index Page to detail page

■Describe these illustrations at 3D image
■Number of total file are 35 (about 80 page in A4 form equivalent)
■Illustrations of device structure and process flow are approximately 190.

Structure of CNT-TFT
　 Bottom contact type
　 Top contact type
　 Flexible CNT-TFT
　 Transparent CNT-TFT

Manufacturing process of bottom contact CNT-TFT (General theory)
Manufacturing process of top contact CNT-TFT (General theory)

Forming process of gate electrode
　 In the case of using vacuum deposited film
　 In the case of using wet type material

Forming process of gate insulator film
　 In the case of use of organic material, wettable inorganic material
　 In the case of use of inorganic material
　 In the case of use of TaOx
　 In the case of use of AlOx＋SAM

Forming process of S/D electrode
　 In the case of inorganic material (Dry-coating method)
　 In the case of wettable material
　 In the case of CNT

Forming process of transparent pixel electrode
　 In the case of transparent oxide material
　 In the case of metal material
　 In the case of wettable material (Conductive polymer, CNT, and Nano size Ag)

Forming process of CNT semiconductor layer
　 In the case of the CVD method
　 In the case of wet-coating method (SAM treatment, Separation and elimination of metallic SWCNT, Wet-coating method)

Co-forming process of S/D and CNT semiconductor layer by use of SAM

Forming process of passivation layer

A word of caution in manufacturing of CNT-TFT with flexible substrate
　 Case of using flexible substrate with film shape
　 CNT-TFT and device are manufactured on original substrate, and then transferred to plastic film
　 Resin is coated on support substrate and cured, and then, CNT-TFT and device are manufactured on resin film, finally, support substrate is released (the resin film is used as substrate)

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